A Micro Control Valve with Integrated Capacitive Sensing for Ambulant Blood Pressure Waveform Monitoring
نویسندگان
چکیده
We have designed and fabricated the first single-wafer proportional micro control valve with built-in capacitive displacement sensing. The displacement sensor can facilitate high-speed active proportional control of gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. We demonstrate a near-linear relation between valve plate displacement and inverse capacitance. The valve shows monotonously increasing flow with decreasing capacitance and increasing pressure.
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